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MCE Series
Alicat MCE Series
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Mass Flow Controller for SEMI apps
링크 및 다운로드
Range : lowest range 0-0.5 sccm/0-500 sμlm
up to highest range 0-20 slpm
Accuracy : ± (0.8% of Reading + 0.2% of Full Scale)
Typical Response Time : 100 ms (Adjustable)
Repeatability : ± 0.2% Full Scale
Operating temperature : -10°C to +60°C
Max internal pressure (static) : 145 psig
Warm-up Time : < 1 Second
