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GF Serise

BROOKS GF Serise

본문

High Purity Digital Thermal Mass Flow Controller [0.003 to 55 SLPM]
  • Specifications

  • Specifications

  • GF100 GF120 GF125

  • Flow Range (lpm)

  • 0.003 - 55 (N2)

  • Max. Operating Pressure (bar)

  • GF100 / GF120
    35

  • GF125
    7

  • Response Time

  • GF100 / GF120
    < 1 sec / 700 ms

  • GF125
    300 - 700 ms

  • Digital Communication

  • RS485, DeviceNet Etc..

  • MultiFlo

  • Standard

  • Temperature Range (℃)

  • 10 - 50