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SLA5800 Serise

BROOKS SLA5800 Serise

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Digital Thermal Mass Flow Controller/ Meter [0.003 to 50 SLPM]
  • Specifications

  • Model

  • SLA5850 (Digital Thermal Mass Flow Controller)
    SLA5860 (Digital Thermal Mass Flow Meter)

  • Flow Range (lpm)

  • 0.003 - 50 (N2)

  • Max. Pressure (bar)

  • 100 (310 Option)

  • Accurcy (%)

  • ±0.18% of F.S. (<20% F.S)

  • Response Time (sec)

  • < 1

  • Temperature Range (℃)

  • -14 to 65

  • Signal In/ Out

  • 0-5V, 4-20mA

  • Interface

  • RS485, Profibus®, DeviceNetTM, EtherCAT®

  • Fitting

  • 1/4", 3/8" LOK or VCR

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