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페이지 정보

5800 Serise

BROOKS 5800 Serise

본문

AnalogueThermal Mass Flow Controller/ Meter [0.003 to 30 SLPM]
  • Model

  • AnalogueThermal Mass Flow Controller 5850E
    AnalogueThermal Mass Flow Meter 5860E

  • Flow Range (lpm)

  • 0.003 to 30 SLPM

  • Max. Pressure (bar)

  • 100

  • Accurcy (%)

  • 5850E (Controller) - 1 (F.S. < 20 slpm)
    5860E (Meter) - F.S. (<20 slpm)

  • Response Time (sec)

  • < 3

  • Temperature Range (℃)

  • 5-65

  • Signal In/ Out (V)

  • 0-5

  • Fitting

  • 1/4", 3/8" LOK or VCR

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